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Electron swarm coefficients in SF6 and CF4 gas mixtures from

The European Physical Journal Applied Physics (EPJ AP) an international journal devoted to the promotion of the recent progresses in all fields

for separation of SF6 from CF4 /air-containing gas stream

2002521-A method and apparatus for the separation and recovery of SF.sub.6 from a gas mixture consisting essentially of SF.sub.6, CF.sub.4, and N.su

of Electron Swarm Parameters in the SF6/CF4 Gas Mixtures -

We use a binary gas mixture Monte Carlo simulation model to calculate the electron transport parameters in SF6/CF4 mixtures in uniform electric fields

of Si and WSiN using ECR plasma of SF6-CF4 gas mixture

Anisotropic etching of Si and WSiN using ECR plasma of SF6-CF4 gas mixture on ResearchGate, the professional network for scientists. Anisotropic etchin

Comparison of SF6 and CF4 Plasma Treatment for Surface Hydro

which was explained by the full dissociation of the SF6 and CF4 gases,interactions using electron beam-generated plasmas produced in Ar/SF6 mixtures

Solubility of 13 non-polar gases (He, Ne, Ar, Kr, Xe, H2~, D2

2015311-Get this from a library! Solubility of 13 non-polar gases (He, Ne, Ar, Kr, Xe, H2~, D2~, N2~, CH4~, C2~H4~, C2~H6~, CF4~ and SF6~

Solubility of Gases in Liquids. 20. Solubility of He, Ne, Ar,

CF4, and SF6 dissolved in several homologous n-alkanes, n-ClH2l+2, and appropriate molecular and/or bulk properties of the gases and n-

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Breakdown characteristics of SF6 /CF4 mixtures in 25.8 kV

SFsub6/sub gas has excellent dielectric strength, but it causes global warming about 23900 times more than COsub2/

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- Reactive ion etching of SiC in SF6 gas: detection of CF,

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products. Applied Physics Letters, American Institute of Physics, 2001,

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The films deposition rate was found to increase with the decreasing CF4 concentration in the gas mixture. Fourier transform spectroscopy revealed the

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Properties of Binary Gas Mixtures of CH4, CF4, SF6, and C(

equilibrium and transport properties of low-density gas mixtures. SF6, Ar–C(CH3)4, Kr–CH4, Kr–CF4, Kr–SF6, Kr–C(CH3)4,

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The fluorination of the polymer polyethylene terephthalate in plasma created from SF6 or CF4 gas at various pressures was investigated. The surface was

The Solubility of Gases in Liquids 9. Solubility of He, Ne,

CO2, CH4, CF4, and SF6 in some Dimethylcyclohexanes at 298 to 313 Kmixtures of cis-+ trans-1,3-dimethylcyclohexane and cis- + trans-1,4-

Use of SF6 and CF4 | SpringerLink

The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this